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Microstructure and mechanical properties of TiN/CrN multilayer coatings deposited in an industrial-scale HiPIMS system
(Surface and Coatings Technology 2025, 515, 2025-11-01)TiN/CrN multilayer coatings of varying bilayer period (Ʌ) were deposited in an industrial-scale deposition plant by means of reactive high power impulse magnetron sputtering. By alternately sputtering ...